The Ultraclean N2 purging cabinet ( Dessicator ) is fully automated allowing full control of N2 input according to requirements. This unit is specially designed for the storage of four x 300mm FOUP pods in an inert environment. Semiconductor Fabs have found that this protects the sensitive wafers from moisture and oxygen related degradation and increases yields. Fabrication material : 304L stainless steel with electropolished finish. Includes inline filter and ultraclean valves.
This purge cabinet is currently unavailable