N2 Purging Cabinet - FOUP storage

N2 Purging Cabinet - FOUP storage

The Ultraclean N2 purging cabinet ( Dessicator ) is fully automated allowing full control of N2 input according to requirements. This unit is specially designed for the storage of four x 300mm FOUP pods in an inert environment. Semiconductor Fabs have found that this protects the sensitive wafers from moisture and oxygen related degradation and increases yields.  Fabrication material : 304L stainless steel with electropolished finish. Includes inline filter and ultraclean valves.

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N2 Purging cabinet - FOUP storage

LxWxH (mm) 683x580x2130
LxWxH (inches) 27x23x84
Cat.No PCSE0605