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FOUP Purge Station - Mk 2 |
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The newly designed 300mm Wafer FOUP Purge Station-Mark 2, is the ideal standalone unit for purging FOUPs with ultraclean Nitrogen.
OHV / AGV / PGV Compatible
Compatible with SEMI Specs:
E84, E57, E64, E15
Placement & Presence sensors
Programmable Purge Programs
Purge Flow monitoring
Compatible with all purgable FOUPs.
The increasing requirement for inert storage of wafers between process steps, makes this Purge Station an invaluable tool that Semiconductor Fabs simply can't afford to be without. |
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